Microstructure of sputter-deposited strontium titanate films

被引：0

作者：

Nakahara, Shohei ^{[1
,2
]}

Kim, Deok-Yang ^{[3
]}

Kim, Jae Jin ^{[4
]}

Hwang, James C.M. ^{[2
]}

机构：

[1] Materials & Surface Science Institute, University of Limerick, Limerick, Ireland

[2] Department of Electrical and Computer Engineering, Lehigh University, Bethlehem,PA, United States

[3] Nanotechnology Advisor at Bergen County Academies, Hackensack,NJ, United States

[4] Department of Materials Science & Engineering, Lehigh University, Bethlehem,PA, United States

来源：

Microscopy | 2011年 / 60卷 / 02期

关键词：

Engineering Village;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Amorphous phasis - Computer simulation of textured electron diffraction pattern - Electron diffraction pattern - Film textures - Low κ - Oriented polycrystalline - Polycrystalline phasis - Strontium titanium oxides - Titanate films - Titanium oxide films

引用

页码：133 / 142