Improving the imaging speed of AFM with modern control techniques

被引：0
|
作者：
Kuiper S. [1 ]
Schitter G. [2 ]
机构：
[1] Delft Center for Systems and Control, Delft University of Technology, 2628CD Delft
[2] Automation and Control Institute, Vienna University of Technology, 1040 Vienna
来源：
Lecture Notes in Control and Information Sciences | 2011年 / 413卷
关键词：
D O I：
10.1007/978-3-642-22173-6_5
中图分类号：
学科分类号：
摘要：
In Atomic Force Microscopy (AFM), the dynamics and non-linearities of the positioning stage are major sources of image artifacts and distortion, especially when imaging at high-speed. This contribution discusses some recent developments to compensate for these adverse effects of the positioning stage dynamics in high-speed AFM by utilizing modern control methods. The improvements on both the lateral scanning motion and in controlling the tip-sample interaction force are demonstrated to allow significantly faster, and more accurate AFM imaging. © 2011 Springer-Verlag Berlin Heidelberg.
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页码：83 / 100
页数：17
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