Fabrication of micro lens array by UV-LED lithography

被引：0
|
作者：
Iguchi, Yusuke [1 ]
Matsumoto, Yoshinori [1 ]
机构：
[1] Faculty of Science and Technology, Department of Applied Physics and Physico-informatics, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama-shi, Kanagawa 223-8522, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2009年 / 129卷 / 10期
关键词：
Microlenses - Glass substrates - Light emitting diodes - Nanoimprint lithography - Molds;
D O I：
10.1541/ieejsmas.129.363
中图分类号：
学科分类号：
摘要：
High curvature micro lens array of 240-570 μm diameters and 110-270 μm heights has been fabricated by using UV-LED lithography and imprinting technique. Curved SU-8 structures were fabricated by backside exposure through thin glass substrate because UV-LED array light source has wide directivity characteristics of UV dose. The structure was transferred to Polydimethylsiloxsane (PDMS) mold. Micro lens array of photosensitive acrylic resin was fabricated by using the mold. © 2009 The Institute of Electrical Engineers of Japan.
引用
收藏
页码：363 / 364
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