Effect of annealing on the high Co-doped Ti1-xCoxO2 magnetic semiconductor

被引:0
作者
Song, Hong-Qiang
Wang, Yong
Yan, Shi-Shen
Mei, Liang-Mo
Zhang, Ze
机构
[1] Department of Space Science and Applied Physics, Shandong University at Weihai, Weihai 264209, China
[2] School of Physics and Microelectronics, Shandong University, Jinan 250100, China
[3] Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
[4] School of Engineering, University of Queensland, QLD 4072, Australia
[5] Beijing University of Technology, Beijing 100022, China
来源
Wuli Xuebao/Acta Physica Sinica | 2008年 / 57卷 / 07期
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摘要
High Co doping concentration Ti1-xCoxO2 magnetic semiconductor films were prepared by rf co-sputtering and then annealed for 2 hours at 200°C, 300°C and 400°C respectively. Microstructure and composition analysis by transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS) indicated that the films were in the metastable state and the annealing has large effect on their microstructure, composition and magnetism.
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页码:4534 / 4538
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