High-speed optical microscanner driven with resonation of lam waves using Pb(Zr,Ti)O3 thick films formed by aerosol deposition

被引：0

作者：

Akedo, Jun ^{[1
]}

Lebedev, Maxim ^{[1
]}

Sato, Harumichi ^{[1
]}

Park, Jaehyuk ^{[1
]}

机构：

[1] National Institute of Advanced Industrial Science and Technology (AIST), 1-2 Numiki, Tsukuba, Ibaraki 305-8564, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2005年 / 44卷 / 9 B期

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页码：7072 / 7077