Recent advances in defect characterization in 6H-SiC using Deep Level Transient Spectroscopy and Positron Annihilation Spectroscopy

被引:0
|
作者
Ling, C.C. [1 ]
Beling, C.D. [1 ]
Gong, M. [2 ]
Chen, X.D. [1 ]
Fung, S. [1 ]
机构
[1] Department of Physics, University of Hong Kong, Pokfulam Road, Hong Kong, Hong Kong
[2] Department of Physics, Sichuan University, Chengdu, Sichuan 610064, China
来源
| 2000年 / Scitec Publications Ltd., Zurich卷 / 183期
关键词
Positron annihilation spectroscopy (PAS);
D O I
10.4028/www.scientific.net/ddf.183-185.1
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Recent advances in defect characterization in 6H-SiC using Deep Level Transient Spectroscopy and Positron Annihilation Spectroscopy
    Ling, CC
    Beling, CD
    Gong, M
    Chen, XD
    Fung, S
    DEFECTS AND DIFFUSION IN SEMICONDUCTORS: ANNUAL RETROSPECTIVE III, 2000, 183-1 : 1 - 23
  • [2] Defect dynamics in P+ implanted 6H-SiC studied by positron annihilation spectroscopy
    Karwasz, GP
    Rurali, R
    Consolati, G
    Godignon, P
    E-MRS 2003 FALL MEETING, SYMPOSIA A AND C, PROCEEDINGS, 2004, 1 (02): : 257 - 260
  • [3] Radiation-induced defects in 4H- And 6H-SiC epilayers studied by positron annihilation and deep-level transient spectroscopy
    Kawasuso, A.
    Weidner, M.
    Redmann, F.
    Frank, T.
    Krause-Rehberg, R.
    Pensl, G.
    Sperr, P.
    Triftshäuser, W.
    Itoh, H.
    Materials Science Forum, 2002, 389-393 (01) : 489 - 492
  • [4] Radiation-induced defects in 4H-and 6H-SiC epilayers studied by positron annihilation and deep-level transient spectroscopy
    Kawasuso, A
    Weidner, M
    Redmann, F
    Frank, T
    Krause-Rehberg, R
    Pensl, G
    Sperr, P
    Triftshäuser, W
    Itoh, H
    SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS, 2002, 389-3 : 489 - 492
  • [5] Characterization of Deep Levels in High-Resistive 6H-SiC by Current Deep Level Transient Spectroscopy
    Kato, Masashi
    Kito, Kosuke
    Ichimura, Masaya
    SILICON CARBIDE AND RELATED MATERIALS 2008, 2009, 615-617 : 381 - 384
  • [6] Defect characterization in electron-irradiated 6H-SiC by positron annihilation
    Polity, A
    Huth, S
    Lausmann, M
    PHYSICAL REVIEW B, 1999, 59 (16) : 10603 - 10606
  • [7] Characterization of deep levels in 6H-SiC by optical-capacitance-transient spectroscopy
    Nakakura, Y. (mkato@hermite.elcom.nitech.ac.jp), 1600, American Institute of Physics Inc. (94):
  • [8] Characterization of deep levels in 6H-SiC by optical-capacitance-transient spectroscopy
    Nakakura, Y
    Kato, M
    Ichimura, M
    Arai, E
    Tokuda, Y
    Nishino, S
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (05) : 3233 - 3238
  • [9] Characterization of deep level defects in sublimation grown p-type 6H-SiC epilayers by deep level transient spectroscopy
    Asghar, M.
    Iqbal, F.
    Faraz, S.
    Jokubavicius, V.
    Wahab, Q.
    Syvajarvi, M.
    PHYSICA B-CONDENSED MATTER, 2012, 407 (15) : 3041 - 3043
  • [10] Deep-level transient spectroscopy of radiation-induced levels in 6H-SiC
    V. S. Ballandovich
    Semiconductors, 1999, 33 : 1188 - 1192