The system and the mechatronics of a pagoda type micro-CMM

被引：14

作者：

Fan, Kuang-Chao ^{[1
,2
]}

Cheng, Fang ^{[2
,3
]}

Wang, Hung-Yu ^{[1
]}

Ye, Jyun-Kuan ^{[1
]}

机构：

[1] Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Roosevelt Rd.

[2] School of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009

[3] School of Mechanical and Aerospace Engineering, Nanyang Technological University, 639798, Singapore

来源：

International Journal of Nanomanufacturing | 2012年 / 8卷 / 1-2期

关键词：

Abbe principle; Co-planar stage; Contact probe; Micro-CMM; Pagoda bridge;

D O I：

10.1504/IJNM.2012.044656

中图分类号：

学科分类号：

摘要：

This paper presents design considerations of a precision micro-CMM system and its mechatronic modules. The basic design concept is to meet the requirements of high stiffness, force balance, thermal balance, Abbe principle, metrology frame and vibration-free. Based on these criteria, a novel bridge of pagoda shape is designed and analysed by optimisation to verify its superior stiffness with force balance and thermal balance structure due to its symmetrical geometry. A high precision Z-ram design with co-axial counterweight and vibration suppression is presented. The design of a novel symmetrical coplanar XY-stage that observes the Abbe principle is explained. This micro-CMM has a measurement range of X: 20 mm, Y: 20 mm and Z: 10 mm. Driven by a commercial ultrasonic motor and fed back by a designed diffraction interference scale, each axis can achieve long stroke and nano-positioning motion. Adding a designed contact scanning measuring probe to the spindle, this system is able to measure any geometry of a part to nanometre resolution. © 2012 Inderscience Enterprises Ltd.

引用

页码：67 / 86

页数：19

共 28 条

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