Progress in 4H-SiC bulk growth

被引：0

作者：

Anikin, Michail ^{[1
]}

Pernot, Etienne ^{[1
]}

Pelissier, Bernard ^{[1
]}

Pons, Michel ^{[2
]}

Pisch, Alexander ^{[2
]}

Bernard, Claude ^{[2
]}

Billon, Thierry ^{[3
]}

Faure, Christian ^{[3
]}

Moulin, Cécile ^{[3
]}

Madar, Roland ^{[1
]}

机构：

[1] LMGP, UMR 5628 CNRS/INPG, Domaine Universitaire, BP 46, FR-38402 St. Martin d'Hères, France

[2] LTPCM, UMR 5614 CNRS/INPG/UJF, Domaine Universitaire, BP 75, FR-38402 Saint Martin d'Heres Cedex, France

[3] LETI-CEA Grenoble, 17 rue des Martyrs, FR-38054 Grenoble Cedex 9, France

来源：

Materials Science Forum | 2001年 / 353-356卷

关键词：

D O I：

10.4028/www.scientific.net/msf.353-356.21

中图分类号：

学科分类号：

摘要：

引用

页码：21 / 24

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