Initial oxidation processes of Si(001) surfaces by supersonic O2 molecular beams: Different oxidation mechanisms for clean and partially-oxidized surfaces

被引：0
|
作者：
Teraoka, Yuden [1 ]
Yoshigoe, Akitaka [1 ]
机构：
[1] Synchrotron Radiat. Research Center, Japan Atomic Energy Res. Institute, 1-1-1 Kouto, Mikazuki-cho, Sayo-gun, Hyogo 679-5148, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 2002年 / 45卷 / 07期
关键词：
Photoemission spectroscopy;
D O I：
10.3131/jvsj.45.604
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：604 / 608
相关论文
共 44 条
  • [31] Irregular Au profile on the SiO2 surface and at the SiO2/Si interface and the oxidation kinetics of thermally oxidized Au-contaminated n-Si (001) surfaces
    Shimizu, H.
    Shimada, S.
    Nagase, S.
    Muta, S.
    Ikeda, M.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (01): : 94 - 98
  • [32] Real time observation of initial thermal oxidation using O2 gas on Si(001) surface by means of synchrotron radiation Si-2p photoemission spectroscopy
    Yoshigoe, A
    Moritani, K
    Teraoka, Y
    APPLIED SURFACE SCIENCE, 2003, 216 (1-4) : 388 - 394
  • [33] A density-functional theory investigation on desorption of O2 on Sn(111) and its comparison with initial oxidation on the X(111) (X=Si, Ge, Sn, Pb) surfaces
    Hu Zi-Yu
    Wan Ping-Yu
    Hou Zhi-Ling
    Shao Xiao-Hong
    CHINESE PHYSICS B, 2012, 21 (12)
  • [34] A density-functional theory investigation on desorption of O2 on Sn(111) and its comparison with initial oxidation on the X(111)(X=Si,Ge,Sn,Pb) surfaces
    胡自玉
    万平玉
    侯志灵
    邵晓红
    Chinese Physics B, 2012, (12) : 396 - 402
  • [35] SUBSTRATE TEMPERATURE-INDUCED CHANGEOVER FROM HOMOGENEOUS TO STEP NUCLEATED GROWTH MODES FOR THE INITIAL THERMAL-OXIDATION OF SI(001) BY O2
    KUBLER, L
    LUTZ, F
    BISCHOFF, JL
    BOLMONT, D
    VACUUM, 1990, 41 (4-6) : 1124 - 1127
  • [36] Real-time monitoring of oxidation processes on Si(001) surface using O2 gas under 1000 K by synchrotron radiation photoemission spectroscopy
    Yoshigoe, A
    Moritani, K
    Teraoka, Y
    SURFACE SCIENCE, 2004, 566 : 1124 - 1129
  • [37] Oxidation and Storage Mechanisms for Nitrogen Oxides on Variously Terminated (001) Surfaces of SrFeO3-δand Sr3Fe2O7-δPerovskites
    Takamatsu, Akihiko
    Tamai, Kazuki
    Hosokawa, Saburo
    Tanaka, Tsunehiro
    Ehara, Masahiro
    Fukuda, Ryoichi
    ACS Applied Materials and Interfaces, 2021, 13 (06): : 7216 - 7226
  • [38] Oxidation and Storage Mechanisms for Nitrogen Oxides on Variously Terminated (001) Surfaces of SrFeO3-δ and Sr3Fe2O7-δ Perovskites
    Takamatsu, Akihiko
    Tamai, Kazuki
    Hosokawa, Saburo
    Tanaka, Tsunehiro
    Ehara, Masahiro
    Fukuda, Ryoichi
    ACS APPLIED MATERIALS & INTERFACES, 2021, 13 (06) : 7216 - 7226
  • [39] Initial oxidation states on Si(001) surface induced by translational kinetic energy of O2 at room temperature studied by Si-2p core-level spectroscopy using synchrotron radiation
    Yoshigoe, A
    Teraoka, Y
    SURFACE SCIENCE, 2001, 482 : 189 - 195
  • [40] Unraveling Exclusive In-Plasma Initiated Oxidation Processes Occurring at Polymeric Surfaces upon O2 Admixtures to Medium Pressure Ar and N2 DBD Treatments
    Ghobeira, Rouba
    Tabaei, Parinaz Saadat Esbah
    Nikiforov, Anton
    Morent, Rino
    De Geyter, Nathalie
    POLYMERS, 2023, 15 (14)
12345