Initial oxidation processes of Si(001) surfaces by supersonic O2 molecular beams: Different oxidation mechanisms for clean and partially-oxidized surfaces

被引：0
|
作者：
Teraoka, Yuden [1 ]
Yoshigoe, Akitaka [1 ]
机构：
[1] Synchrotron Radiat. Research Center, Japan Atomic Energy Res. Institute, 1-1-1 Kouto, Mikazuki-cho, Sayo-gun, Hyogo 679-5148, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 2002年 / 45卷 / 07期
关键词：
Photoemission spectroscopy;
D O I：
10.3131/jvsj.45.604
中图分类号：
学科分类号：
摘要：
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页码：604 / 608
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