Atomically controlled fabrication process as the next generation ultra-precision machining technology

[1] Fang F.Z., Zhang X.D., Weckenmann A., Zhang G.X., Evans C., Manufacturing and measurement of freeform optics, CIRP Annals-Manufacturing Technology, 62, pp. 823-846, (2013)

[2] Nouira H., Bergmans R.H., Kiing A., Piree H., Henselmans R., Spaan H.A.M., Ultra-high precision CMMs and their associated tactile or/and optical scanning probes, Int. J. Metrol. Qual. Eng., 5, (2014)

[3] Assoufid L., Brown N., Crews D., Sullivan J., Erdmann M., Qian J., Jemian P., Yashchuk V.V., Takacs P.Z., Artemiev N.A., Merthe D.J., McKinney W.R., Siewert F., Zeschke T., Development of a high-performance gantry system for a new generation of optical slope measuring profilers, Nuclear Instruments and Methods in Physics Research, A710, pp. 31-36, (2013)

[4] Siewert F., Buchheim J., Zeschke T., Brenner G., Kapitzki S., Tiedtke K., Sub-nm accuracy metrology for ultra-precise reflective X-ray optics, Nuclear Instruments and Methodsin Physics Research, A635, pp. S52-S57, (2011)

[5] Kudo R., Kitayama T., Tokuta Y., Shiraji H., Nakano K Yamamura M., Endo K., High-accuracy three-dimensional as-pheric mirror measurement with nanoprofiler based on normal vector tracing method, Optics and Lasers in Engineering, 98, pp. 159-162, (2017)

[6] Kitayama K., Shiraji H., Yamamura K., Endo K., Measurement of aspheric mirror by nanoprofiler using normal vector tracing, SPIE Optics+Photonics, 9962-10, (2016)

[7] Kudo R., Okita K., Okuda K., Tokuta Y., Nakano M., Yamamura K., Endo K., Simulation-based systematic error compensation for nanoprofiler using normal vector tracing method, Measurement, 73, pp. 473-479, (2015)

[8] Kudo R., Okuda K., Usuki K., Nakano M., Yamamura K., Endo K., Three-dimensional surface figure measurement of high-accuracy spherical mirror with nanoprofiler using normal vector tracing method, Review of Scientific Instruments, 85, pp. 045101-045105, (2014)

[9] Kudo R., Endo K., A nanoprofiler using the normal vector tracing method for high accuracy aspheric mirrors, ASPE/ ASPEN Summer Topical Meeting, pp. 83-86, (2014)

[10] Usuki K., Kitayama T., Matsumura H., Kojima T., Uchikoshi Y., Higashi J., Endo K., Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler, Nanoscale Research Letters, 8, (2013)

[1] Fang F.Z., Zhang X.D., Weckenmann A., Zhang G.X., Evans C., Manufacturing and measurement of freeform optics, CIRP Annals-Manufacturing Technology, 62, pp. 823-846, (2013)

[2] Nouira H., Bergmans R.H., Kiing A., Piree H., Henselmans R., Spaan H.A.M., Ultra-high precision CMMs and their associated tactile or/and optical scanning probes, Int. J. Metrol. Qual. Eng., 5, (2014)

[3] Assoufid L., Brown N., Crews D., Sullivan J., Erdmann M., Qian J., Jemian P., Yashchuk V.V., Takacs P.Z., Artemiev N.A., Merthe D.J., McKinney W.R., Siewert F., Zeschke T., Development of a high-performance gantry system for a new generation of optical slope measuring profilers, Nuclear Instruments and Methods in Physics Research, A710, pp. 31-36, (2013)

[4] Siewert F., Buchheim J., Zeschke T., Brenner G., Kapitzki S., Tiedtke K., Sub-nm accuracy metrology for ultra-precise reflective X-ray optics, Nuclear Instruments and Methodsin Physics Research, A635, pp. S52-S57, (2011)

[5] Kudo R., Kitayama T., Tokuta Y., Shiraji H., Nakano K Yamamura M., Endo K., High-accuracy three-dimensional as-pheric mirror measurement with nanoprofiler based on normal vector tracing method, Optics and Lasers in Engineering, 98, pp. 159-162, (2017)

[6] Kitayama K., Shiraji H., Yamamura K., Endo K., Measurement of aspheric mirror by nanoprofiler using normal vector tracing, SPIE Optics+Photonics, 9962-10, (2016)

[7] Kudo R., Okita K., Okuda K., Tokuta Y., Nakano M., Yamamura K., Endo K., Simulation-based systematic error compensation for nanoprofiler using normal vector tracing method, Measurement, 73, pp. 473-479, (2015)

[8] Kudo R., Okuda K., Usuki K., Nakano M., Yamamura K., Endo K., Three-dimensional surface figure measurement of high-accuracy spherical mirror with nanoprofiler using normal vector tracing method, Review of Scientific Instruments, 85, pp. 045101-045105, (2014)

[9] Kudo R., Endo K., A nanoprofiler using the normal vector tracing method for high accuracy aspheric mirrors, ASPE/ ASPEN Summer Topical Meeting, pp. 83-86, (2014)

[10] Usuki K., Kitayama T., Matsumura H., Kojima T., Uchikoshi Y., Higashi J., Endo K., Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler, Nanoscale Research Letters, 8, (2013)