The loss kinetics of substitutional carbon in Si1-xCx regrown by solid phase epitaxy

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[1] Kim, Yong Jeong
[2] Kim, Tae-Joon
[3] Kim, Tae-Kyung
[4] Park, Byungwoo
[5] Song, Jong Han
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Kim, Y.J. (sanmaro1@snu.ac.kr) | 1600年 / Japan Society of Applied Physics卷 / 40期
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