High aspect ratio fabrications of micro journal air bearings for micro gas turbine engine

被引：0
|
作者：
Shan, X.C. [1 ]
Murakoshi, Y. [2 ]
Wang, Z.F. [1 ]
Lu, H.J. [1 ]
Jin, Y.F. [1 ]
Ikehara, T. [2 ]
Maeda, R. [2 ]
Wong, C.K. [1 ]
机构：
[1] SIMTech, Singapore Inst. of Mfg. Technology, 71 Nanyang Drive, 638075 Singapore
[2] Natl. Inst. Adv. Indust. Sci./T., 1-2-1 Namiki, Tsukuba, 305-8564, Japan
来源：
Proc SPIE Int Soc Opt Eng | 1600年 / 428-433期
关键词：
Compendex;
D O I：
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
中图分类号：
学科分类号：
摘要：
Aspect ratio - Compressors - Masks - Micromachining - Piezoelectric devices - Reactive ion etching - Silicon
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