Interface morphology of thermal-oxide/Si(001) studied by scanning tunneling microscopy

被引：0
|
作者：
Gotoh, Masahide [1 ]
Sudoh, Koichi [1 ]
Iwasaki, Hiroshi [1 ]
机构：
[1] Inst. of Sci./Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki 567-0047, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 12期
关键词：
D O I：
10.1143/jjap.41.7293
中图分类号：
学科分类号：
摘要：
Interfaces (materials)
引用
收藏
页码：7293 / 7296
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