Effect of vertical laser drilling speed on drilling shapes in femtosecond laser helical drilling of an aluminosilicate glass substrate

被引：0
作者：
Lee H.-M. [1 ]
Lee H. [1 ]
Moon S.-J. [1 ]
机构：
[1] Dept. of Mechanical Engineering, Hanyang Univ.
来源：
Transactions of the Korean Society of Mechanical Engineers, A | 2017年 / 41卷 / 12期
关键词：
Aluminosilicate glass; Femtosecond laser; Laser helical drilling;
D O I：
10.3795/KSME-A.2017.41.12.1163
中图分类号：
学科分类号：
摘要：
The effect of the vertical speed of the laser head on the high geometrical accuracy and high quality of thru-holes is analyzed in the laser helical drilling of a glass substrate. The vertical speed of the laser head affects the helical layer pitch. This is a crucial parameter for determining the complete penetration and machining quality of thru-holes. An aluminosilicate glass substrate with a thickness of 400 μm was drilled via a femtosecond pulsed laser at a wavelength of 1552 nm and with a pulse duration of 800 fs. The laser vertical moving speed is theoretically obtained by the relation with the laser power and the ablation depth. This theoretical method is investigated by experimental results. The vertical speed of the laser head affects the formation of cracks, chippings and heat affected zone. © 2017 The Korean Society of Mechanical Engineers
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页码：1163 / 1169
页数：6
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