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- [31] Thin-absorber extreme-ultraviolet lithography mask with light-shield border for full-field scanner: flatness and image placement change through mask process JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2010, 9 (02):
- [36] Ageing Effect on Mechanical Properties of Machined Nanostructures ADVANCED MATERIALS AND ENGINEERING MATERIALS II, 2013, 683 : 145 - +
- [39] Effect of ageing on dielectric properties of poly(methylmethacrylate) Polymer communications Guildford, 1989, 30 (09): : 270 - 272