Quantitative estimation of physical processes at a contactless scanning microwave microscopy

被引：0

作者：

Gordienko, Yu.E. ^{[1
]}

Larkin, S.Yu. ^{[1
]}

Prokaza, A.M. ^{[1
]}

机构：

[1] Kharkiv National University of Radio Engineering and Electronics, Kharkiv, 61166, 14, Lenin Ave

来源：

Telecommunications and Radio Engineering (English translation of Elektrosvyaz and Radiotekhnika) | 2012年 / 71卷 / 03期

关键词：

Aperture; Field distribution; Probe; Q-factor; Resonant frequency; Resonator measurement transducer; Scanning microwave microscopy; Sensitivity; Spatial resolution;

D O I：

10.1615/TelecomRadEng.v71.i3.80

中图分类号：

学科分类号：

摘要：

Electromagnetic properties of resonator probes with coaxial measuring aperture, which are widely used in scanning microwave microscopy (SMM), are studied in this paper. Quantitative estimations of dependence of the dimensions of near-field localization and the spatial distribution of its components upon the aperture geometry, shape of the point and the size of the air gap between the object and the aperture of the resonator measurement sensor (RMS) are determined. The influence of the gap upon electromagnetic properties and characteristics of the system «microwave probe - air gap - object» is also investigated. It is demonstrated that availability of the gap exerts a substantial influence upon the value of spatial resolution of the microprobes and results in essential loss of sensitivity by the microwave sensor of the SMM. The obtained results might serve as the basis for the general theory of resonator microprobes with coaxial measuring aperture for SMM semiconductors and dielectrics possessing submicron resolution values. © 2012 by Begell House, Inc.

引用

页码：265 / 276

页数：11

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