Crystal interface-enhanced thermal stability of CrAlN/SiNx multilayer films

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作者
He, Youxing [1 ,2 ]
Wang, Xiaobo [3 ]
Guo, Tao [1 ,2 ]
Gao, Kewei [1 ,2 ]
Pang, Xiaolu [1 ,2 ]
机构
[1] Beijing Advanced Innovation Center for Materials Genome Engineering, University of Science and Technology Beijing, Beijing,100083, China
[2] The State Key Laboratory for Advanced Metals and Materials, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing,100083, China
[3] China United Gas Turbine Technology Co., Ltd., Beijing,100015, China
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