Design and simulation of a novel 3-DOF MEMS convective gyroscope

This paper reports on the design and simulation of a novel MEMS based convective gyroscope which can independently detect three components of angular rate. The sensor was designed with standard bulk MEMS technology. The 3D jet flow was simulated in the confined space formed by MEMS compatible laminated-structures. The configuration of the sensor consists of a PZT diaphragm, caps, in-plane tungsten hotwires located on the surface of a 0.4mm-thick circular silicon frame with diameter of 10mm. The simulated scale factors of the sensor are SFz = 0.83 μV/o/s, SF x = SFy = 3.10 μV/o/s. In measurement application, the 3DOF gyro eliminates the sensor-to-sensor misalignment, and therefore provides accurate measurement with small cross-sensitivity. The sensor also has high shock resistance since no proof mass is used. © 2008 The Institute of Electrical Engineers of Japan.