Fabrication of 700V SiC-SIT with ultra-low on-resistance of 1.01mΩ-cm2

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作者
Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology, Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan [1 ]
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Compendex;
D O I
International Conference on Silicon Carbide and Related Materials 2005, (ICSCRM 2005)
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摘要
Current density - Electric breakdown - Energy gap - Epitaxial growth - Silicon carbide
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