Synthesis and characterization of TiN/SiNx multilayered thin films by ion beam sputtering

被引：0
|
作者：
机构：
来源：
| 2000年 / Vacuum Society of Japan, Tokyo, Jpn卷 / 43期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Synthesis and characterization of TiN/SiNx multilayered thin films by ion beam sputtering
    Ochi, Atsushi
    Aoi, Yoshifumi
    Kamijo, Eiji
    2000, Nihon Shinku Kyokai, Tokyo, Japan (43):
  • [2] Synthesis of complex TiN thin films by ion beam sputtering method
    Kamijo, Eiji, 1600, (38):
  • [3] PROPERTIES OF INDIUM OXIDE TIN OXIDE MULTILAYERED FILMS PREPARED BY ION-BEAM SPUTTERING
    SUZUKI, T
    YAMAZAKI, T
    ODA, H
    JOURNAL OF MATERIALS SCIENCE, 1988, 23 (08) : 3026 - 3030
  • [4] Synthesis of silicon carbide thin films by ion beam sputtering
    Valentini, A
    Convertino, A
    Alvisi, M
    Cingolani, R
    Ligonzo, T
    Lamendola, R
    Tapfer, L
    THIN SOLID FILMS, 1998, 335 (1-2) : 80 - 84
  • [5] Synthesis of silicon carbide thin films by ion beam sputtering
    Universita di Bari, Bari, Italy
    Thin Solid Films, 1-2 (80-84):
  • [6] Deposition and Characterization of CrN Thin Films by Reactive Ion Beam Sputtering
    Dhawan, Rajnish
    Rai, Sanjay
    61ST DAE-SOLID STATE PHYSICS SYMPOSIUM, 2017, 1832
  • [7] ION-BEAM SPUTTERING APPARATUS FOR DEPOSITION OF MULTILAYERED FILMS
    SUZUKI, T
    YAMAZAKI, T
    TAKAHASHI, K
    KAGEYAMA, T
    ODA, H
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1988, 7 (01) : 79 - 80
  • [8] TiN thin films deposited by ion beam sputtering: effects of energetic particles bombardment
    Popovic, N
    Bogdanov, Z
    Goncic, B
    Zec, S
    Rakocevic, Z
    Zlatanovic, M
    Perusko, D
    THIN SOLID FILMS, 2004, 459 (1-2) : 286 - 291
  • [9] SYNTHESIS AND MICROSTRUCTURE OF SUPERHARD TiN/SiNx MULTILAYER THIN FILMS
    M.P. LeBlanc
    ActaMetallurgicaSinica(EnglishLetters), 2005, (03) : 242 - 248
  • [10] Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam
    Choe, YS
    Chung, JH
    Kim, DS
    Baik, HK
    SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3): : 267 - 270
12345