Insight into temperature impact of Ta filaments on high-growth-rate diamond (100) films by hot-filament chemical vapor deposition

被引：0

作者：

Takamori, Yue ^{[1
]}

Nagai, Masatsugu ^{[1
]}

Tabakoya, Taira ^{[1
]}

Nakamura, Yuto ^{[1
]}

Yamasaki, Satoshi ^{[2
]}

Nebel, Christoph E. ^{[2
,3
]}

Zhang, Xufang ^{[1
,2
]}

Matsumoto, Tsubasa ^{[1
,2
]}

Inokuma, Takao ^{[1
]}

Tokuda, Norio ^{[1
,2
]}

机构：

[1] Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa,Ishikawa,920-1192, Japan

[2] Nanomaterials Research Institute, Kanazawa University, Kanazawa,Ishikawa,920-1192, Japan

[3] Diamond and Carbon Applications, Bürgerwehrstrasse 1, Freiburg,79102, Germany

来源：

关键词：

Compendex;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Activation energy - Growth rate - Methane - Temperature distribution - Chemical vapor deposition - Surface reactions - Arrhenius plots

引用