共 13 条
- [1] Kittel C.A., Introduction to solid state physics, Am. J. Phys., 21, pp. 547-548, (1954)
- [2] Woo Y.S., Dong E.L., Lee W.I., Molecular dynamic studies on deformation of polymer resist during thermal nano imprint lithographic process, Tribol. Lett., 36, pp. 209-222, (2009)
- [3] Sok R.M., Berendsen H.J.C., Gunsteren W.F.V., Molecular dynamics simulation of the transport of small molecules across a polymer membrane, J. Chem. Phys., 96, pp. 4699-4704, (1992)
- [4] Yang Z.Z., The study of polymer micro-structure plate to plate hot embossing process, (2015)
- [5] Jing P.S., The study of polymer surface micro-structure flat hot embossing process and equipment, (2014)
- [6] Wu D., Sun J., Liu Y., Et al., Rapid fabrication of microstructure on PMMA substrate by the plate to plate transition-spanning isothermal hot embossing method nearby glass transition temperature, Polym. Eng. Sci., 57, (2017)
- [7] Sun J.Y., Wu D.M., Liu Y., Et al., Polymer micro-nano manufacturing technology, China Rubber/Plastics Technology and Equipment, 10, pp. 1-9, (2016)
- [8] Juang Y.J., Lee L.J., Koelling K.W., Rheological analysis of polyvinyl butyral near the glass transition temperature, Polym. Eng. Sci., 41, pp. 275-292, (2010)
- [9] Yi-Je J., James L.L., Koelling K.W., Hot embossing in microfabrication. Part I: Experimental, Polym. Eng. Sci., 42, pp. 539-550, (2002)
- [10] Yi-Je J., James L.L., Koelling K.W., Hot embossing in microfabrication. Part II: Rheological characterization and process analysis, Polym. Eng. Sci., 42, pp. 551-566, (2002)