Poly-silicon micromachined switch

被引:0
|
作者
Zhang, Zhengyuan [1 ,2 ]
Wen, Zhiyu [1 ]
Xu, Shiliu [2 ]
Zhang, Zhengfan [2 ]
Li, Kaicheng [2 ]
Huang, Shanglian [1 ]
机构
[1] Dept. of Optoelectron. Eng., Chongqing Univ., Chongqing 400044, China
[2] Lab. of Analog Integrated Circuits, Chongqing 400060, China
来源
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2002年 / 23卷 / 09期
关键词
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学科分类号
摘要
Semiconductor switches
引用
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页码:914 / 920
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