Poly-silicon micromachined switch

被引：0
|
作者：
Zhang, Zhengyuan [1 ,2 ]
Wen, Zhiyu [1 ]
Xu, Shiliu [2 ]
Zhang, Zhengfan [2 ]
Li, Kaicheng [2 ]
Huang, Shanglian [1 ]
机构：
[1] Dept. of Optoelectron. Eng., Chongqing Univ., Chongqing 400044, China
[2] Lab. of Analog Integrated Circuits, Chongqing 400060, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2002年 / 23卷 / 09期
关键词：
D O I：
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中图分类号：
学科分类号：
摘要：
Semiconductor switches
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页码：914 / 920
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