Carbon contamination modeling on extreme ultraviolet optic surfaces

被引：0
|
作者：
Lu, Guoqing [1 ,2 ]
Lu, Qipeng [1 ]
Peng, Zhongqi [1 ]
Gong, Xuepeng [1 ]
机构：
[1] State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China
[2] University of Chinese Academy of Sciences, Beijing 100049, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2013年 / 33卷 / 12期
关键词：
27;
D O I：
10.3788/AOS201333.1234001
中图分类号：
学科分类号：
摘要：
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