Characterisation of interfacial adhesion of thin film/substrate systems using indentation-induced delamination: A focused review

被引:10
作者
Lu, Mingyuan [1 ]
Xie, Hongtao [1 ]
Huang, Han [1 ]
机构
[1] School of Mechanical and Mining Engineering, University of Queensland, Brisbane
关键词
Acoustic emission; Adhesion; Bilayer; Delamination; Indentation; Thin film;
D O I
10.4028/www.scientific.net/KEM.533.201
中图分类号
学科分类号
摘要
This review summarized the research works on the characterisation of interfacial adhesion in thin film/substrate bilayer structure by use of indentation testing. It focused on the delamination mechanics between a thin film and a substrate induced by indentation and the quantitative characterisation of interfacial strength in such bilayer systems. Three major techniques were introduced, namely conventional indentation, cross-sectional indentation and acoustic emission assisted indentation. A number of theoretical models and finite element simulation studies were discussed, in association with the experimental investigations. ©(2013) Trans Tech Publications, Switzerland.
引用
收藏
页码:201 / 222
页数:21
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