Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting

被引：1
作者：
Gao F. [1 ]
Li J.-H. [1 ,2 ]
Tian A.-L. [3 ]
Liu B.-C. [3 ]
Li S.-J. [3 ]
Yue X. [3 ]
机构：
[1] School of Science Xi'an Technological University, Xi'an Technological University, Xi'an
[2] School of Computer Science and Engineering, Xi'an Technological University, Xi'an
[3] School of Optoelectronics Engineering, Xi'an Technological University, Xi'an
来源：
Tian, Ai-Ling (ailintian@xatu.edu.cn) | 1600年 / Chinese Optical Society卷 / 46期
关键词：
Absolute test; Computer simulation; Interferotry; Measurement error; Optical testing; Zernike polynomials;
D O I：
10.3788/gzxb20174609.0912008
中图分类号：
学科分类号：
摘要：
Based on Zernike polynomials fitting, the measurement errors posed by optical axis deviation, rotation angle and active area on different types of high-precision surface were analyzed and the experimental verifications were conducted respectively. The results show that the measurement is not sensitive to the rotation angle and active area, the cost of calibrated rotation angle can therefore be reduced, while the impact of optical axis deviation on measurement precision is rather significant, which should be strictly adjusted before the test on high-precision surface. © 2017, Science Press. All right reserved.
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