Compliance analysis and calculation of θXθYZ compliant mechanism

被引：0

作者：

机构：

[1] School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai

来源：

Zhu, Li-Min | 1600年 / Tsinghua University卷 / 31期

关键词：

Compliance; Compliance matrix; Compliant mechanism; Finite element analysis; Leaf flexure;

D O I：

10.6052/j.issn.1000-4750.2013.03.0156

中图分类号：

学科分类号：

摘要：

A modeling method, using the compliance matrix, is proposed in this study to analyze the θXθYZ compliant mechanism consisting of leaf flexures. The closed-form equations are formulated for the compliance elements in the compliance matrix, which are validated by the finite element analysis (FEA) and experiments. Both FEA and experimental results coincide well with theoretical results. By analyzing the closed-form equations, the effects of geometric parameters on the compliant performance of the mechanism are investigated. The compliance matrix provides an effective and accurate method for the design and theoretical analysis of the θXθYZ compliant mechanism, which is of great significance for the practical application of compliant mechanisms in micro-/nano-fabrication equipment.

引用

页码：204 / 208and222

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