Evolution of crystal mosaicity during physical vapor transport growth of SiC

被引:0
|
作者
Katsuno, Masakazu [1 ]
Ohtani, Noboru [1 ]
Fujimoto, Tatsuo [1 ]
Aigo, Takashi [1 ]
Yashiro, Hirokatsu [1 ]
机构
[1] Nippon Steel Corporation, Advanced Technology Research Laboratories, 20-1 Shintomi, Futtsu, Chiba 293-8511, Japan
关键词
Physical vapor transport (PVT) - Physical vapor transport growth - Polytype instabilities - Surface orientations;
D O I
10.4028/www.scientific.net/msf.389-393.55
中图分类号
学科分类号
摘要
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页码:55 / 58
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