Surface temperature measurement using a carbon nanotube probe

被引：0
作者：
Amano, Juo [1 ]
Hirotani, Jun [1 ]
Ikuta, Tatsuya [1 ]
Nishiyama, Takashi [1 ]
Takahashi, Koji [1 ]
机构：
[1] Department of Aeronautics and Astronautics, School of Engieering, Kyushu University, Nishi-ku, Fukuoka, 819-0395, 744, Motooka
来源：
Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B | 2013年 / 79卷 / 799期
关键词：
Carbon nanotube; MEMS; Pt hot film; Quantitative temperature measurement;
D O I：
10.1299/kikaib.79.390
中图分类号：
学科分类号：
摘要：
A new technique of micro/nanoscale temperature measurement is developed using an individual carbon nanotube (CNT) on a platinum hot-film, which can control the heat flow through the CNT probe and sense its own average temperature. A feedback control to extinct the heat flow enables us to neglect the effect of contact thermal resistance and to know the real surface temperature. Spatial resolution of 70 nm, temperature uncertainty of less than 0.5 K and enough robustness are achieved. Using this method, quantitative temperature profiles are obtained around a line heater of 604 nm-width and 9.73 μm-length. ©2013 The Japan Society of Mechanical Engineers.
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页码：390 / 398
页数：8
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