Target ablation characteristics of thin films during nanosecond pulsed laser deposition in the ablation process

被引：0
|
作者：
Tan, Xin-Yu
Zhang, Duan-Ming
Li, Zhi-Hua
Guan, Li
Li, Li
机构：
[1] Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China
[2] Department of Physics, Three Gorges University, Yichang 443002, China
来源：
Wuli Xuebao/Acta Physica Sinica | 2005年 / 54卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3915 / 3921
相关论文
共 50 条
  • [21] Deposition of PZT thin films by pulsed laser ablation for MEMS application
    Maeda, R
    Kikuchi, K
    Schroth, A
    Umezawa, A
    Matsumoto, S
    SMART ELECTRONICS AND MEMS, 1997, 3242 : 372 - 379
  • [22] Deposition of zinc oxide thin films by reactive pulsed laser ablation
    Bilkova, P.
    Zemek, J.
    Mitu, B.
    Marotta, V.
    Orlando, S.
    APPLIED SURFACE SCIENCE, 2006, 252 (13) : 4604 - 4609
  • [23] Pulsed laser ablation deposition of ZrC films
    De Maria, G
    D'Alessio, LD
    Ferro, D
    Teghil, R
    HIGH TEMPERATURE MATERIALS CHEMISTRY, PTS I AND II, PROCEEDINGS, 2000, 15 : 645 - 648
  • [24] Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia
    Mihailescu, IN
    Lita, A
    Teodorescu, VS
    Luches, A
    Martino, M
    Perrone, A
    Gartner, M
    JOURNAL OF MATERIALS SCIENCE, 1996, 31 (11) : 2839 - 2847
  • [25] Experimental study on the laser-matter-plume interaction and its effects on ablation characteristics during nanosecond pulsed laser scanning ablation process
    Yuan, Jiandong
    Liang, Liang
    Lin, Guozhi
    Li, Xiaoqiang
    Hang, Ming
    OPTICS EXPRESS, 2019, 27 (16) : 23204 - 23216
  • [26] Morphological and Fractal Analysis of Thin Ge Films Deposited by Nanosecond Pulsed Laser Ablation
    Dubcek, P.
    Pivac, B.
    Krstulovic, N.
    Milosevic, S.
    Bernstorff, S.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017, 17 (06) : 4009 - 4016
  • [27] Nanosecond laser ablation of composite thin films in liquid
    Nikov, Ro
    Dikovska, A.
    Nedyalkov, N.
    Nikova, T.
    Karashanova, D.
    XXI INTERNATIONAL CONFERENCE AND SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS, 2021, 1859
  • [28] Uniform target ablation in pulsed-laser deposition
    N. Arnold
    D. Bäuerle
    Applied Physics A, 1999, 68 : 363 - 367
  • [29] Uniform target ablation in pulsed-laser deposition
    Arnold, N
    Bäuerle, D
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (03): : 363 - 367
  • [30] Deposition of borocarbides thin films by pulsed laser ablation: Growth parameters and characterization
    Ferdeghini, C
    Cimberle, MR
    Grassano, G
    Marre, D
    Putti, M
    Canepa, F
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 1999, 13 (9-10): : 1049 - 1054
12345