Stitching Interferometry: A Flexible Solution for Surface Metrology

被引：131

作者：

Murphy, Paul ^{[1
]}

Forbes, Greg ^{[1
]}

Fleig, Jon ^{[1
]}

Dumas, Paul ^{[1
]}

Tricard, Marc ^{[1
]}

机构：

[1] QED Technologies, Rochester, NY

来源：

Optics and Photonics News | 2003年 / 14卷 / 05期

关键词：

D O I：

10.1364/OPN.14.5.000038

中图分类号：

学科分类号：

摘要：

The use of subaperture stitching in increasing the capability of an interferometer is discussed. Parts that would require large transmission spheres can be tested on a stitching system at higher resolution. Advances in the development of algorithms allow system calibration to be an integral part of a stitching system. This enables calibration of lateral errors as well as accurate determination of magnification and distortion.

引用

页码：38 / 43

页数：5

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