Properties of TiN coatings deposited by condensation with ion bombardment accompanied by high-energy ion beam

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Obrezkov, O.I.
Vershok, B.A.
Dormashev, A.B.
Margulev, I.Ya.
Molchanova, S.A.
Andreev, E.S.
Dervuk, V.V.
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Izvestiya Akademii Nauk. Ser. Fizicheskaya | 2002年 / 66卷 / 08期
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页码：1199 / 1204
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