Preparation and properties of photosensitive polyimide/titania-silica hybrid materials

被引：33

作者：

Li, Liu ^{[1
]}

Qinghua, Lu ^{[1
]}

Jie, Yin ^{[1
]}

Zikang, Zhu ^{[1
]}

Daocheng, Pan ^{[1
]}

Zongguang, Wang ^{[1
]}

机构：

[1] Research Institute of Polymer Materials, School of Chemistry and Chemical Technology, Shanghai Jiao Tong University, Shanghai, 200240, China

来源：

Materials Science and Engineering C | 2002年 / 22卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Photolithography - Photosensitivity - Silica - Sol-gels - Thermodynamic stability;

D O I：

10.1016/S0928-4931(01)00312-5

中图分类号：

学科分类号：

摘要：

A complex inorganic-polymer hybrid material of polyimide/titania-silica with photolithographic property was prepared by sol-gel process. Polyimide (PI) was based on benzophone-3,3′, 4,4′ -tetracarboxylic dianhydride (BTDA) and 4,4′ -diamino-3,3′ -dimethyl- diphenylmethane (MMDA) and is negatively photosensitive. The introduction of titania leads to increased refractive index while the introduction of silica leads to improved thermal stability of the hybrid. © 2002 Elsevier Science B.V. All rights reserved.

引用

页码：61 / 65