Influence of gains on the quality of topographic images based on atomic force microscopy

被引：0
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作者：
Key Laboratory of Micro-Nano Materials for Energy Storage and Conversion of Henan Province, Institute of Surface Micro and Nano Materials, Xuchang University, Xuchang, China [1 ]
机构：
来源：
J. Adv. Microso. Res. | / 1卷 / 50-53期
关键词：
Attenuation gain - Draw - Electronic functions - Gain - Integral gain - Sample morphology - Stripe - Topographic images;
D O I：
10.1166/jamr.2015.1237
中图分类号：
学科分类号：
摘要：
The atomic force microscopy (AFM) based on various forces between tips and samples could be used to investigate the various physical properties, such as sample morphology, surface roughness and factor to improve the quality of the surface topography image. According to the experiment, draws and stripes always appear in the surface topography image scanned by AFM, which affect the quality of the surface topography image. For a certain film with electronic function in nanometer measure, the effect of amplitude, integral gain, proportion gain, attenuation gain and speed gain on the surface topography image are systematically investigated. Based on the rules, the way to eliminate or lighten the draws and stripes appeared in the surface topography image can be found. Copyright © 2015 American Scientific Publishers.
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