Sheath-to-sheath transport of dust particles in a capacitively coupled discharge

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作者：

Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany ^{[1
]}

不详 ^{[2
]}

不详 ^{[3
]}

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来源：

Plasma Sources Sci Technol | / 3卷

关键词：

Capacitively coupled - Capacitively coupled discharges - Ion drag forces - Particle simulations - Potential profiles - Radio frequency discharges - Variable phase - Voltage waveforms;

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引用

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