Sheath-to-sheath transport of dust particles in a capacitively coupled discharge

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Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany [1 ]
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Plasma Sources Sci Technol | / 3卷
关键词：
Capacitively coupled - Capacitively coupled discharges - Ion drag forces - Particle simulations - Potential profiles - Radio frequency discharges - Variable phase - Voltage waveforms;
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