Influence factor analysis for gas fluctuation of aerostatic guideway

被引：5

作者：

Chen, Dongju ^{[1
]}

Bian, Yanhua ^{[1
]}

Zhou, Shuai ^{[1
]}

Fan, Jinwei ^{[1
]}

机构：

[1] College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing

来源：

Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2014年 / 50卷 / 15期

关键词：

Aerostatic guideway; Cyclone phenomenon; Gas fluctuation; Machining accuracy; Stability;

D O I：

10.3901/JME.2014.15.097

中图分类号：

学科分类号：

摘要：

For the problem of the gas fluctuation of the aerostation, the structure of gas pocket, the diameter parameters of the orifice, and the supply pressure of the guideway impact on the gas film cyclone and fluctuation is researched, The cyclone phenomenon is close relationship with the gas fluctuation by comparing the simulation data. From the simulation results we obtained the factors affecting the gas fluctuation are: The orifice diameter, the structure shape of the gas pocket and gas pressure size. The pressure size in the above factors affects the gas fluctuation greatly, this was verified by experiment, and the law of the vibration is good agreement with the simulation results. This provides a theoretical basis to inhibit the gas film fluctuation of the aerostatic guideway from the structure and process parameters, and to improve the stability and machining accuracy. ©2014 Journal of Mechanical Engineering

引用

页码：97 / 103

页数：6

共 10 条

[1]

Li S., Guo Y., Zhu Z., Static characteristics analysis and basic parameters optimization of aerostatic bearing for precision machine tool , Journal of Lubrication Engineering, 37, 1, pp. 29-32, (2012)

[2]

Belforte G., Raparelli T., Viktorov V., Discharge coefficients of orifice-type restrictor for aerostatic bearings, Tribology International, 40, pp. 512-521, (2007)

[3]

Aoyama T., Kakinuma Y., Kobayashi Y., Numerical and experimental analysis for the small vibratioin of aerostatic guideways , Annals of the CIRP, 55, 1, pp. 419-422, (2006)

[4]

Aoyama T., Koizumi K., Kakimuma Y., Et al., Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores , CIRP Annals-Manufacturing Technology, 58, pp. 367-370, (2009)

[5]

Kawai T., Ebihara K., Takeuchi Y., Improvement of machining accuracy of 5-axis control ultraprecision machining by means of laminarization and mirror surface finishing , Annals of the CIRP, 54, 1, pp. 329-332, (2005)

[6]

Sawada K., Kawai T., Ebihara K., Et al., Improvement of air bearing performance by means of laminarization and its application to ultraprecision micromachining, (2003)

[7]

Mori H., Theoretical investigation of pressure depression in externally pressurized gas lubricated circular thrust bearing , 83, pp. 201-208, (1999)

[8]

Chen X., He X., The effect of the recess shape on performance analysis of the gas lubricated bearing in optical lithography , Tribology International, 39, 11, pp. 1336-1341, (2006)

[9]

Chen D., Zhang F., Fu P., Identification fluctuation of aerostatic guideway , Journal of Mechanical Engineering, 46, 21, pp. 187-193, (2010)

[10]

Burgdorfer A., The influence of the molecular mean free path on the performance of hydrodynamic gas lubrication bearings , ASME Journal of Basic Engineering, 81, pp. 94-100, (1999)

← 1 →