Preparation of c-axis oriented AlN film

被引：0
|
作者：
Gong, Hui [1 ]
Fan, Zhengxiu [1 ]
机构：
[1] Inst. of Optics and Fine Mech., Chinese Acad. of Sci., Shanghai 201800, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2002年 / 22卷 / 08期
关键词：
Aluminium nitride thin films;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：933 / 936
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