共 50 条
- [41] 20 nm polysilicon gate patterning and application in 36 nm complementary metal-oxide-semiconductor devices JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06): : 2352 - 2359
- [42] Damage-free metal-oxide-semiconductor gate electrode patterning on thin HfSiON film using neutral beam etching JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (04): : 1414 - 1420
- [47] DEGRADATION AND RECOVERY OF METAL-OXIDE-SEMICONDUCTOR (MOS) DEVICES STRESSED WITH FOWLER-NORDHEIM (FN) GATE CURRENT JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (9A): : 1931 - 1936
- [48] Effects of HfOxNy gate-dielectric nitrogen concentration on the charge trapping properties of metal-oxide-semiconductor devices Cheng, C.-L., 1600, Japan Society of Applied Physics (43):
- [50] Effects of HfOxNy gate-dielectric nitrogen concentration on the charge trapping properties of metal-oxide-semiconductor devices JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2004, 43 (9A-B): : L1181 - L1183