Fermi level tuning using the Hf-Ni alloy system as a gate electrode in metal-oxide-semiconductor devices

被引:0
|
作者
Avner Rothschild, Jonathan [1 ]
Cohen, Aya [1 ]
Brusilovsky, Anna [1 ]
Kornblum, Lior [1 ]
Kauffmann, Yaron [1 ]
Amouyal, Yaron [1 ]
Eizenberg, Moshe [1 ]
机构
[1] Department of Materials Engineering, Technion - Israel Institute of Technology, Haifa 32000, Israel
来源
Journal of Applied Physics | 2012年 / 112卷 / 01期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] Fully quantum-mechanical modeling of tunneling current in ultrathin gate oxide metal-oxide-semiconductor devices
    Iwata, H.
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2001, 40 (07): : 4496 - 4500
  • [32] Fully quantum-mechanical modeling of tunneling current in ultrathin gate oxide metal-oxide-semiconductor devices
    Iwata, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (07): : 4496 - 4500
  • [33] Yttrium-scandium oxide as high-k gate dielectric for germanium metal-oxide-semiconductor devices
    Bera, M. K.
    Song, J.
    Ahmet, P.
    Kakushima, K.
    Tsutsui, K.
    Sugii, N.
    Hattori, T.
    Iwai, H.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2010, 25 (06)
  • [34] Characteristics of TaSixNy thin films as gate electrodes for dual gate Si-complementary metal-oxide-semiconductor devices
    Suh, YS
    Heuss, G
    Misra, V
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (01): : 175 - 179
  • [35] NbO as gate electrode for n-channel metal-oxide-semiconductor field-effect-transistors
    Gao, W
    Conley, JF
    Ono, Y
    APPLIED PHYSICS LETTERS, 2004, 84 (23) : 4666 - 4668
  • [36] METHOD FOR REDUCTION IN SURFACE GENERATION CURRENT IN POLYCRYSTALLINE-SILICON-GATE METAL-OXIDE-SEMICONDUCTOR DEVICES
    SHEU, YD
    HAWKINS, GA
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (09) : 4694 - 4696
  • [37] Formation of reliable HfO2/HfSixOy gate-dielectric for metal-oxide-semiconductor devices
    Quan, YC
    Lee, JE
    Kang, H
    Roh, Y
    Jung, D
    Yang, CW
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (11B): : 6904 - 6907
  • [38] Analytic model for direct tunneling current in polycrystalline silicon-gate metal-oxide-semiconductor devices
    Register, LF
    Rosenbaum, E
    Yang, K
    APPLIED PHYSICS LETTERS, 1999, 74 (03) : 457 - 459
  • [39] Characteristics of HfO2/HfSixOy film as an alternative gate dielectric in metal-oxide-semiconductor devices
    Kang, H
    Roh, Y
    Bae, G
    Jung, D
    Yang, CW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (04): : 1360 - 1363
  • [40] Method for reduction in surface generation current in polycrystalline-silicon-gate metal-oxide-semiconductor devices
    Sheu, Yea-Dean
    Hawkins, Gilbert A.
    Journal of Applied Physics, 1993, 73 (09):