Diagnostics of plasma based on one-dimensional model of capacitively coupled radio-frequency discharge

被引：0

作者：

Zhang, Bailing ^{[1
]}

Fan, Hao ^{[1
]}

Li, Yiwen ^{[1
,2
]}

Yang, Pengyu ^{[1
,3
]}

Gao, Ling ^{[1
]}

Wang, Yutian ^{[1
]}

机构：

[1] Science and Technology on Plasma Dynamics Laboratory, Air Force Engineering University, Xi'an,710038, China

[2] College of Astronautics, Northwestern Polytechnical University, Xi'an,710072, China

[3] China Aerodynamics Research and Development Center, Mianyang,621000, China

来源：

Gaodianya Jishu/High Voltage Engineering | 2015年 / 41卷 / 12期

基金：

中国国家自然科学基金;

关键词：

Electric discharges - Equivalent circuits - Plasma diagnostics - Radio waves - Waveform analysis - Magnetoplasma;

D O I：

10.13336/j.1003-6520.hve.2015.12.017

中图分类号：

学科分类号：

摘要：

引用

页码：3994 / 3999