Optimal position estimation of AFM tip based on stochastic approach

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机构：
[1] [1,Yuan, Shuai
[2] Yao, Xiao
[3] Luan, Fangjun
[4] Guo, Song
[5] Feng, Jiyuan
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Yao, Xiao (m18002426818_1@163.com) | 1600年 / Science Press卷 / 38期
关键词：
731.1 Control Systems - 741.3 Optical Devices and Systems - 913.1 Production Engineering - 922.1 Probability Theory - 961 Systems Science;
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