Novel type of portable vacuum leak calibrator apparatus

被引：0

作者：

Lu, Yaowen ^{[1
]}

Chen, Xu ^{[1
]}

Li, Detian ^{[2
]}

Liu, Bo ^{[3
]}

Qi, Jing ^{[1
]}

Cha, Liangzheng ^{[1
]}

机构：

[1] Tsinghua University, Beijing 100084, China

[2] Lanzhou Institute of Physics, Lanzhou 730000, China

[3] Measuring and Festing Institute Under Xi'an Aerospace Corporation, Xi'an 710100, China

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2013年 / 33卷 / 12期

关键词：

Calibration;

D O I：

10.3969/j.issn.1672-7126.2013.12.03

中图分类号：

学科分类号：

摘要：

引用

页码：1179 / 1183

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