Direct numerical inversion method for kinetic ellipsometric data. I. Presentation of the method and numerical evaluation

被引：0

作者：

Kouznetsov, Dmitri ^{[1
]}

Hofrichter, Alfred ^{[1
]}

Drévillon, Bernard ^{[1
]}

机构：

[1] Laboratoire de Physique des ICM, Ecole Polytechnique, Palaiseau, France

来源：

Applied Optics | 2002年 / 41卷 / 22期

关键词：

Ellipsometry - Matrix algebra - Optical films - Permittivity - Polarimeters - Polynomials - Real time systems - Spectroscopic analysis - Thin films;

D O I：

暂无

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学科分类号：

摘要：

A direct numerical inversion method for the determination of the refractive index and the thickness of the outermost layer of a thin transparent film on top of a multilayer has been developed. This method is based on a second-order Taylor decomposition of the coefficients of the Abeles matrices of the newly grown layer. The variations of the real-time spectroscopic ellipsometry data are expressed as polynomial functions depending on the dielectric constant and the thickness of the newly grown layer. The method is fast, capable of single-wavelength and multiwavelength inversion of continuous as well as discontinuous-index profiles, and can be adapted to many different polarimetric instruments. © 2002 Optical Society of America.

引用

页码：4510 / 4518