Numerical simulation for ULSI manufacturing process

被引：0
|
作者：
Hiyama, Hirokuni
Wang, Xinming
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2008年 / 74卷 / 05期
关键词：
D O I：
10.2493/jjspe.74.435
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：435 / 440
相关论文
共 50 条
  • [31] Numerical simulation on metallic additive manufacturing
    Chen JiaWei
    Xiong FeiYu
    Huang ChenYang
    Lian YanPing
    SCIENTIA SINICA-PHYSICA MECHANICA & ASTRONOMICA, 2020, 50 (09)
  • [32] Enhanced application of virtual manufacturing: influences of material parameters on numerical Simulation of forming process
    Sulaiman, M. S.
    Manurung, Y. H. P.
    Graf, M.
    Bauer, A.
    Awiszus, B.
    Omar, A. R.
    Kuntjoro, W.
    Adenan, M. S.
    6TH INTERNATIONAL CONFERENCE ON ADVANCES IN MECHANICAL ENGINEERING 2019 (ICAME 2019), 2020, 834
  • [33] 3-D numerical modeling and simulation of nanoscale FinFET for the application in ULSI circuits
    Ramesh, R.
    Madheswaran, M.
    Kannan, K.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2011, 44 (01): : 80 - 86
  • [34] The CMP study of silica dielectric in ULSI manufacturing
    Tan, BM
    Liu, YL
    Li, WW
    Jiang, JG
    SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 379 - 381
  • [35] The double jet ionizer for ULSI manufacturing processes
    Imazono, H
    Terashige, T
    Okano, K
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2002, 15 (02) : 189 - 193
  • [36] A Simulation Study on Garment Manufacturing Process
    Liong, Choong-Yeun
    Rahim, Nur Azreen Abdul
    2ND ISM INTERNATIONAL STATISTICAL CONFERENCE 2014 (ISM-II): EMPOWERING THE APPLICATIONS OF STATISTICAL AND MATHEMATICAL SCIENCES, 2015, 1643 : 460 - 466
  • [37] Computer simulation of the swaging manufacturing process
    Echempati, R
    Srinivasan, S
    PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON GEARING, TRANSMISSIONS, AND MECHANICAL SYSTEMS, 2000, : 447 - 452
  • [38] Wafer inspection technology challenges for ULSI manufacturing
    Stokowski, S
    Vaez-Iravani, M
    CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 1998, 449 : 405 - 415
  • [39] X-ray lithography for ULSI manufacturing
    Microlithography World, 1997, 6 (01): : 10 - 14
  • [40] Simulation modelling in manufacturing process design
    Greasley, Andrew
    Engineering Management Journal, 1999, 9 (04): : 187 - 192
12345