[1] MicroNano System Research Center, College of Information Engineering, Taiyuan University of Technology, Taiyuan, Shanxi, China
[2] Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education, Taiyuan University of Technology, Taiyuan, Shanxi, China
[3] Key Laboratory of Instrumentation Science and Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan, China