Formation of ultrathin continuous films by ion-beam treatment

被引:0
|
作者
Maishev, Yu.P. [1 ]
Shevchuk, S.L. [1 ]
Kudrya, V.P. [1 ]
机构
[1] Instutite of Physics and Technology, Russian Academy of Sciences, Bid. 1, 36 Nakhimovsky av, Moscow,117218, Russia
来源
Applied Physics | 2018年 / 2018-January卷 / 04期
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4
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页码:79 / 83
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