Formation of ultrathin continuous films by ion-beam treatment

被引：0
|
作者：
Maishev, Yu.P. [1 ]
Shevchuk, S.L. [1 ]
Kudrya, V.P. [1 ]
机构：
[1] Instutite of Physics and Technology, Russian Academy of Sciences, Bid. 1, 36 Nakhimovsky av, Moscow,117218, Russia
来源：
Applied Physics | 2018年 / 2018-January卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
4
引用
收藏
页码：79 / 83
相关论文
共 50 条
  • [1] ION-BEAM ANALYSIS OF ULTRATHIN DIELECTRIC FILMS
    BAUMVOL, IJR
    ROLFS, C
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4): : 431 - 435
  • [2] Magnetic properties of ion-beam sputter deposited NiFe ultrathin films
    Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1995, 13 (04):
  • [3] FORMATION OF CBN FILMS BY ION-BEAM ASSISTED DEPOSITION
    WADA, T
    YAMASHITA, N
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (03): : 515 - 520
  • [4] Growth and thermal decomposition of ultrathin ion-beam deposited C:H films
    J Appl Phys, 6 (2462):
  • [5] ON THE FORMATION OF CARBON-FILMS BY ION-BEAM ASSISTED METHOD
    OGATA, K
    ANDOH, Y
    KAMIJO, E
    EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 366 - 368
  • [6] ON THE FORMATION OF BN FILMS BY ION-BEAM AND VAPOR-DEPOSITION
    ANDOH, Y
    OGATA, K
    KAMIJO, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4): : 678 - 680
  • [7] Temperature field of dielectric films under continuous ion-beam irradiation
    T. Kh. Salikhov
    A. A. Abdurahmonov
    Thermophysics and Aeromechanics, 2017, 24 : 953 - 956
  • [8] Temperature field of dielectric films under continuous ion-beam irradiation
    Salikhov, T. Kh.
    Abdurahmonov, A. A.
    THERMOPHYSICS AND AEROMECHANICS, 2017, 24 (06) : 953 - 956
  • [9] An ion-beam apparatus for the formation of oxide films by the oxygen ion sputtering technique
    Stognij, AI
    Svirin, VT
    Tushina, SD
    Novitskii, NN
    Protazanova, TM
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2001, 44 (03) : 420 - 423
  • [10] An Ion-Beam Apparatus for the Formation of Oxide Films by the Oxygen Ion Sputtering Technique
    A. I. Stognij
    V. T. Svirin
    S. D. Tushina
    N. N. Novitskii
    T. M. Protazanova
    Instruments and Experimental Techniques, 2001, 44 : 420 - 423
12345