Deposition rate simulation of unbalanced magnetron sputtering

被引：0
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作者：
Hosokawa, Yoshiyuki
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来源：
| 2002年 / Kobe Steel Ltd卷 / 52期
关键词：
Balanced magnetron sputtering - Deposition rate - Target erosion - Unbalanced magnetron sputtering;
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页码：35 / 38
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